Question

What is the standard wavelength used in Extreme Ultraviolet (EUV) lithography?

• A. 248 nm
• B. 193 nm
• C. 13.5 nm
• D. 365 nm

Hint:

EUV lithography wavelength → {13.5 nm}

Answer 1

The Correct Option is C

Concept:
Lithography is a key process in semiconductor manufacturing used to transfer patterns onto silicon wafers. As device sizes shrink to the nanoscale, shorter wavelengths of light are required to achieve higher resolution.
Step 1:Understanding EUV lithography.
Extreme Ultraviolet (EUV) lithography is an advanced lithographic technique used in modern semiconductor fabrication to produce extremely small integrated circuit features.
Step 2:Wavelength used in EUV systems.
EUV lithography uses radiation with a wavelength of approximately: \[ 13.5 \ \text{nm} \] This extremely short wavelength enables patterning of very small transistor features used in modern processors.
Step 3:Importance in nanotechnology.
EUV lithography is widely used in advanced semiconductor manufacturing nodes such as 7 nm, 5 nm, and smaller technologies. Conclusion:
Therefore, the standard wavelength used in EUV lithography is 13.5 nm.