Step 1: Recall molecular geometries.
- XeF\(_4\): Square planar (due to 2 lone pairs on Xe).
- BF\(_3\): Trigonal planar (\(sp^2\)-hybridized).
- BCl\(_3\): Trigonal planar (\(sp^2\)-hybridized).
- PCl\(_3\), NCl\(_3\): Trigonal pyramidal (due to lone pairs) → not planar.
- XeF\(_6\): Distorted octahedral → not planar.
Step 2: Correct combination.
Only option (4) has all planar species: XeF\(_4\), BF\(_3\), BCl\(_3\).
Final Answer:
\[
\boxed{\text{XeF\(_4\), BF\(_3\), BCl\(_3\)}}
\]